News
2022_09_17 Conference "Plasma Surface Engineering" at Erfurt, Germany:
- Poster Contribution PSE 2022: "Plasma diagnostic with plasma probes and a Retarding Field Analyzer on ECR plasma sources, excited with 433 MHz", H. Schlemm, Jenion
- Poster Contribution PSE 2022: "Ion energy analysis of sputtering ions at planar targets with DC- and RF-sputtering by Retarding Field Analysis", H. Schlemm, Jenion,
2023_03_14 28. Erfahrungsaustausch OTPIP Mühlleithen 2023, Germany
- Presentation: "UHF-ECR-Plasmas, excited with 433 MHz, for Plasma- and
Broad Ion Beam Sources", H. Schlemm, Jenion
2023_12_13, International Conference on Reactive Sputter Deposition 2023
IOM Leipzig, Germany:
- Poster Contribution: "Magnetron Sputtering with controlled primary ion energy", H.Schlemm, Jenion
2024_03_14 29. Erfahrungsaustausch OTPIP Mühlleithen 2024, Germany
- Presentation: "Magnetron Sputtering with Controlled primary Ion Energy - first results, future work", H.Schlemm, Jenion
2024_09_03, Conference "Plasma Surface Engineering" at Erfurt, Germany:
- Poster Contribution PSE 2024: "Magnetron Sputtering with controlled primary ion energy", H. Schlemm, Jenion,
- Poster Contribution PSE 2024: "Copper- and silicon layers, sputtered with a magnetron with
controlled primary ion energy", H. Schlemm, Jenion,
