Technical Data of
Alternating Cold Cathode Plasma Sources

Technical data of the circular plasma sources JENION ACC-40 PS and ACC-80 PS:

property

JENION ACC-40 PS

JENION ACC-80 PS

Plasma sources dimensions

   

Plasma output dimensions

40 mm diameter

80 mm diameter

Vacuum flange

ISO 100 K, CF 100 or inline mounted

ISO 100 K, CF 100 or inline mounted

Output plasma current

10 100 mA

0.1 - 0.5 A

Discharge current

10 100 mA

0.1 - 0.5 A

Discharge voltage

350 - 800 Vs

350 - 800 Vs

Bias Voltage

0 V to 400 V

0 V to 400 V

ion current density near field plasma [mAcm-2]

0.1 to 1

0.1 to 1

ion current density chamber plasma [µAcm-2]

10 to 50

10 to 50

ion energy [eV]

20 200 eV

20 200 eV

impurities

0.05 to 1 % of the plasma current

0.05 to 1 % of the plasma current

neutralizer

Optional filament or plasma bridge

Optional filament or plasma bridge

gas flow [sccm]

5 - 30 (Ar)

10 - 100 (Ar)

water flow for cooling [l/min]

1 5 (only for long term operation)

1 5

Technical data of the linear plasma sources:

property

ACC-40x150 PS

ACC-40x300 PS

ACC-40x600 PS

dimensions (length x width x height) [mm]

200 x 100 x 190

350 x 100 x 190

650 x 100 x 190

Plasma output width

60 mm

60 mm

60 mm

Plasma output length

150 mm

300 mm

600 mm

Homogeneous plasma length (at 100 mm distance, < 5%)

75 100 mm

200 250 mm

450 500 mm

vacuum flange

Inline mounted

(optional ISO 250, CF 250)

Inline mounted

Inline mounted

ion energy [eV]

20 200 eV

20 200 eV

20 200 eV

ion current density near field plasma [mAcm-2]

0.1 - 1.0

0.1 - 1.0

0.1 - 1.0

ion current density chamber plasma [µAcm-2]

10 50 µAcm-2

10 50 µAcm-2

10 50 µAcm-2

discharge voltage

500 900 V

500 900 V

500 900 V

discharge current

25 150 mA

50 300 mA

100 500 mA

Bias voltage

0 to 400 V

0 to 400 V

0 to 400 V

Neutralizer

Optional filament or plasma bridge

Optional filament or plasma bridge

Optional filament or plasma bridge

gas input

5 25 sccm

5 50 sccm

10 100 sccm

impurities (% of ion beam current density)

0.03 - 1

0.03 1

0.03 - 1

Cooling water flow

Optional (1-3 l/min)

1-3 l/min

2-5 l/min


 
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