Description of
Alternating Cold Cathode Plasma Sources

The ACC-plasma sources from JENION are cost effective solution for high vacuum plasma generation in circular and linear dimensions up to 600 mm length. Because these types of plasma sources generate a plasma with ions of an ion energy distribution between 20 and 200 eV often they are also called low energy ion sources.

Circular Plasma source ACC-80 PS
with filament neutralizer

Linear Plasma Source JENION ACC-40x150 PS

Plasma source ACC-80 PS
in operation with nitrogen
(4x10-4 mbar, Iplasma= 0.25 A)

Linear plasma source ACC-40x150 PS
in operation with oxygen
(4x10-4 mbar, Iplasma= 0.25 A)


 
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