Description of
Alternating Cold Cathode Plasma Sources

The ACC-plasma sources from JENION are cost effective solution for high vacuum plasma generation in circular and linear dimensions up to 600 mm length. Because these types of plasma sources generate a plasma with ions of an ion energy distribution between 20 and 200 eV often they are also called low energy ion sources.

Circular Plasma source ACC-80 PS
with filament neutralizer

Linear Plasma Source JENION ACC-40x150 PS

Plasma source ACC-80 PS
in operation with nitrogen
(4x10-4 mbar, Iplasma= 0.25 A)

Linear plasma source ACC-40x150 PS
in operation with oxygen
(4x10-4 mbar, Iplasma= 0.25 A)

Principle         Applications         Download

Homepage of JENION


Thank you for visiting our website. Good bye.
Copyright © 2003 JENION. All Rights Reserved.                                                         Contents subject to change without notice.