Description of
Linear Broad Beam Ion Sources

The ion sources are inline mounted and equipped with a computer controlled electronic control unit as a compact and cost effective solution for all fields in industrial use and in research and development requiring a linear broad ion beam.


Ion Source JENION ACC-30x125 IS

 

The ion sources generate a homogeneous linear ion beam at a wide ion energy range from 50 to more than 1000 eV. Together with a linear substrate transport mechanism ion beam processes can be carried out with accurate homogeneity and high productivity.

Ion source JENION ACC-30x125 IS
in operation with oxygen

Ion source JENION ACC-30x125 IS
in operation with hydrogen

The ion sources are filamentless and operate with nearly all kinds of gases and also (heated versions up to 300 C) with metal vapours of low temperature melting metals.

The following table shows the technical date of the ion sources:

Property

ACC-30x150 IS

ACC-40x300 IS

ACC-40x600 IS

dimensions (length x width x hight) [mm]

200 x 100 x 190

350 x 100 x 190

650 x 100 x 190

Ion beam width (at 100 mm distance)

40 mm

60 mm

60 mm

ion beam length (at 100 mm distance)

150 mm

300 mm

600 mm

homogeneous ion beam length (at 100 mm distance, < 5%)

75 100 mm

200 250 mm

450 500 mm

vacuum flange

Inline mounted
(optional ISO 250, CF 250)

Inline mounted

Inline mounted

ion energy [eV]

50 1000 eV

50 1000 eV

50 1000 eV

ion current density [mAcm-2]

0.1 - 1.5

0.1 - 1.5

0.1 - 1.5

ion beam

5 50 mA

10 100 mA

20 250 mA

discharge voltage

500 900 V

500 900 V

500 900 V

discharge current

25 150 mA

50 300 mA

100 500 mA

Neutralizer

Optional filament or plasma bridge

Optional filament or plasma bridge

Optional filament or plasma bridge

grid system

2 grid system from graphite (optional stainless steel, titanium, tungsten)

2 grid system from graphite (optional stainless steel, titanium, tungsten)

2 grid system from graphite (optional stainless steel, titanium, tungsten)

gas input

3 15 sccm

5 25 sccm

10 50 sccm

impurities (% of ion beam current density)

0.03 - 1

0.03 1

0.03 - 1

Cooling water flow

Optional (1-3 l/min)

1-3 l/min

2-5 l/min


 
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