Examples, recent Projects

The following projects had been done in the past:
  • Ion beam impurity analysis of mass filtered broad ion beams (project with Institute for Surface Modification, Leipzig, www.iom.uni-leipzig.de,1998).
    see: "Ion beam impurity analysis of radio-frequency mass filtered broad ion beams", Rev. of Sci. Instruments, vol. 69, No.2 (1999) 1191.
  • Reactive ion beam etching (RIBE) of quartz glass with ACC-ion sources, max. etch rate 1µm/min, (contribution to projects at Institute for Surface Modification, Leipzig, 1999).
  • Development of microstructured and other electrode systems for plasma generation at high pressure up to atmospheric pressure (contribution to a bmbf-project of Roth&Rau AG, Hohenstein-Ernstthal, www.roth-rau.de, 1999 - 2001).
    see: H. Schlemm, D. Roth, "Atmospheric pressure plasma processing with microstructure electrodes and microplanar reactors", Surf. and Coatings Technology 142-144, (2001) 272-276.
    and:
    D. Roth, H. Schlemm, K.-H. Gericke, H. Schmidt-Böcking, Deutsches Patent DE 100 32 955 A1 (2000).
  • Refinement of microwave plasma sources for use in industrial photovoltaic thin film deposition (contribution to developments of Roth&Rau AG, Hohenstein-Ernstthal www.roth-rau.de, 2000 - 2002),
    see: "Large scale industrial silicon nitride deposition at photovoltaik cells with linear microwave plasma sources", H. Schlemm, A.Mai, S. Roth, D. Roth, K.-M. Baumgärtner, H.Muegge, contr. to PSE 2002 Garmisch Partenkirchen, to be published at Surf. Coatings Technology.
  • Solar cell technology of mc-silicon wafers (contribution to projects of Roth&Rau AG, Hohenstein-Ernstthal), 2001 - 2003),
    see: W. J. Soppe, J.Hong, W.M.M. Kessels, M.C.M. van de Sanden, W.M. Arnoldbik, H. Schlemm, C. Devilée, H. Rieffe, S.E.A. Schiermeier, J.H. Bultman and A.W. Weeber ,"ON COMBINING SURFACE AND BULK PASSIVATION OF SiNx:H LAYERS FOR mc-Si SOLAR CELLS", to be published by IEEE 2002.
  • Development of a method for two dimensional ion beam profile control for broad ion beams (project together with Institute for Surface Modification, Leipzig, www.iom.uni-leipzig.de, 2001-2003).
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