Plasma Sheath Probe Arrays

 

The figure shows the principle of probe measuring with plasma sheath probes.

A cylinder shaped probe (typical diameter of 6 mm) is embedded in a ground area, which has to be about 2 scales larger in comparison to Langmuir-Probes.

The probe current is recorded respective ground.

 
  A typical plasma sheath probe array of 16 probes with a distance of 50 mm

 
A typical probe characteristic
of a plasma sheath probe,
measured at a RF-plasma
with variable RF-power
 
Ion current density profile
of a RF-plasma at different RF-powers

 
Problems of Plasma Analysis in Thin Film Technology         Applications         Download        

Langmuir Probe Arrays         Retarding Field Analyzer        

 
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