Langmuir Probe Arrays


The figure shows the principle of plasma probe measuring with a simple Langmuir probe.

The probe, a 5-10 mm long tungsten wire with 0.1 mm diameter, is placed in the plasma by a sufficiently long rod.

The probe current respective ground is recorded in form of an U-I-diagram.

Part of a Langmuir probe array with 16 probes
in distance of 30 mm
A typical probe characteristic
(Ar, 0.1 mbar)

Problems of Plasma Analysis in Thin Film Technology         Applications         Download        

Plasma Sheath Probe Arrays         Retarding Field Analyzer        

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